 SI-TECH, INC. provides a variety of silicon services.
The
majority of these services are listed below.
Typical uniformity
is less than or equal to five (5) per cent unless
otherwise noted.
Please see our Products page for additional offerings |
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OXIDE
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76.2mm (3") |
100mm (4") |
125mm (5") |
150mm (6") |
200mm (8") |
300mm (12") |
| THERMAL* |
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| PETEOS |
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| TEOS |
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* Typical < = 2 % Uniformity, Max. < = 5 %
The typical thickness range for Thermal Oxide is 250 up to 24,000 Angstroms.
The typical thickness range for TEOS, and P Doped Oxide is
500 up to 10,000 Angstroms
Call SI-TECH with your requirements for a quotation
or use our online form.
POLISHING
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50.8mm |
76.2mm
(3") |
100mm
(4") |
125mm
(5") |
150mm
(6") |
200mm
(8") |
300mm
(12") |
| FULL |
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| CLEANING |
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| TWO SIDE |
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| RECLAIM |
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SI-TECH can guarantee cleanliness of < = 30
particles at .3 microns for all diameters and <= 40
particles at .2 microns for diameters greater than or equal
to 125 millimeters.
Call SI-TECH with your requirements
for a quotation or use our online form.
| PVD |
76.2mm (3") |
100mm (4") |
125mm (5") |
150mm (6") |
200mm (8") |
300mm (12") |
| Al |
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| AlCu .5% |
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| AlCu 2% |
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| The typical thickness range for Aluminum
and Aluminum Copper is 5,000 up to 12,000 Angstroms. |
| Cu 200-15 K A. |
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| Ta 200-2 K A. |
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| TaN 200-3 K A. |
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| Ti 200-5 K A. |
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| TiN 200-3 K A. |
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| W 200-5 K A. |
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| Cr 200A – 2 KA |
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* Please call, fax, or use our online form for thickness information.
Call SI-TECH with your requirements
for a quotation or use our online form.
GALIUM ARSINIDE POLISH RECLAIM
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50.8mm |
76.2mm (3") |
100mm (4") |
125mm (5") |
150mm (6") |
| GaAs |
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Please note that there is a minimum order of 5 wafers for reclaim services.
Call SI-TECH with your requirements for a quotation
or use our online form.
POLYSi
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50.8mm |
76.2mm (3") |
100mm (4") |
125mm (5") |
150mm (6") |
200mm (8") |
300mm (12") |
| UNDOPED |
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| P Doped |
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The typical thickness range for Polysilicon is 1,000 up
to 10,000 Angstroms
Call SI-TECH with your requirements
for a quotation or use our online form.
PHOTOLITHOGRAPHY
| |
50.8mm |
76.2mm (3") |
100mm (4") |
125mm (5") |
150mm (6") |
200mm (8") |
300mm (12") |
| PROXIMITY |
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| 0.5um Step Masking |
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| 0.7um Step Masking |
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| CHECKERBOARD MASKING |
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NITRIDE
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50.8mm |
76.2mm (3") |
100mm (4") |
125mm (5") |
150mm (6") |
200mm (8") |
300mm (12") |
| LPCVD |
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The typical thickness range for Nitride is 200 up to 3,000 Angstroms
WAFER RECYCLING
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76.2mm |
100mm |
125mm |
150mm |
200mm |
300mm |
| Strip Polysilicon & Nitride films |
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| Wet Strip Metals & Oxides Under Metal |
| Removable Metals: Al, Ti, TiN, Ta, TaN, Cu, TiW, W, Co |
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EPITAXY
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76.2mm |
100mm |
125mm |
150mm |
200mm |
300mm |
| Silicon Germanium |
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| Silicon Carbon |
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| Silicon Phosphorous |
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Minimum Order 5 wafers. We can handle batches of up to 50 wafers at a time.
SI-TECH can quote on your EPI wafer needs. Please contact us
with your requirements for price quotations.
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Min. Order |
Batch Size |
Notes |
76.2mm/3 inch
Silicon Wafers |
50 |
50 |
Any order that is less than 50 wafers is subject to a
lot charge. |
100mm/4 inch
Silicon Wafers |
50 |
50 |
Any order that is less than 50 wafers is subject to a
lot charge. |
300mm/12 inch
Silicon Germanium |
5 |
50 |
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300mm/12 inch
Silicon Carbon |
5 |
50 |
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POCL3
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76.2mm |
100mm |
125mm |
150mm |
200mm |
300mm |
| Phos doped |
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AMORPHOUS Si
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76.2mm |
100mm |
125mm |
150mm |
200mm |
300mm |
| 200-1500 Angstroms |
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WET PATTERN ETCH
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76.2mm |
100mm |
125mm |
150mm |
200mm |
300mm |
| OXIDE 7:1 BOE |
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| Al METAL ETCH |
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Call SI-TECH with your
requirements for a quotation or use our online form.
Prices subject to change without notice
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